Capacitance type transducer and method of manufacturing the same
A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating fil...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | Akiyama Takahiro Torashima Kazutoshi |
| description | A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US9752924B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US9752924B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US9752924B23</originalsourceid><addsrcrecordid>eNrjZHBwTixITM4sScxLTlUoqSwAEkWJecUppcmpRQqJeSkKuaklGfkpCvlpCrmJeaVpicklpUWZeekKJRmpCsWJuak8DKxpiTnFqbxQmptBwc01xNlDN7UgPz61GGh4al5qSXxosKW5qZGlkYmTkTERSgB7IjEy</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Capacitance type transducer and method of manufacturing the same</title><source>esp@cenet</source><creator>Akiyama Takahiro ; Torashima Kazutoshi</creator><creatorcontrib>Akiyama Takahiro ; Torashima Kazutoshi</creatorcontrib><description>A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode.</description><language>eng</language><subject>FOR PERFORMING MECHANICAL WORK IN GENERAL ; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL ; MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES ; MEASURING ; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY ; PERFORMING OPERATIONS ; PHYSICS ; TESTING ; TRANSPORTING</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170905&DB=EPODOC&CC=US&NR=9752924B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25568,76551</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170905&DB=EPODOC&CC=US&NR=9752924B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Akiyama Takahiro</creatorcontrib><creatorcontrib>Torashima Kazutoshi</creatorcontrib><title>Capacitance type transducer and method of manufacturing the same</title><description>A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode.</description><subject>FOR PERFORMING MECHANICAL WORK IN GENERAL</subject><subject>GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL</subject><subject>MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES</subject><subject>MEASURING</subject><subject>METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2017</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHBwTixITM4sScxLTlUoqSwAEkWJecUppcmpRQqJeSkKuaklGfkpCvlpCrmJeaVpicklpUWZeekKJRmpCsWJuak8DKxpiTnFqbxQmptBwc01xNlDN7UgPz61GGh4al5qSXxosKW5qZGlkYmTkTERSgB7IjEy</recordid><startdate>20170905</startdate><enddate>20170905</enddate><creator>Akiyama Takahiro</creator><creator>Torashima Kazutoshi</creator><scope>EVB</scope></search><sort><creationdate>20170905</creationdate><title>Capacitance type transducer and method of manufacturing the same</title><author>Akiyama Takahiro ; Torashima Kazutoshi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US9752924B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2017</creationdate><topic>FOR PERFORMING MECHANICAL WORK IN GENERAL</topic><topic>GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL</topic><topic>MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES</topic><topic>MEASURING</topic><topic>METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Akiyama Takahiro</creatorcontrib><creatorcontrib>Torashima Kazutoshi</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Akiyama Takahiro</au><au>Torashima Kazutoshi</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Capacitance type transducer and method of manufacturing the same</title><date>2017-09-05</date><risdate>2017</risdate><abstract>A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US9752924B2 |
| source | esp@cenet |
| subjects | FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES MEASURING METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING |
| title | Capacitance type transducer and method of manufacturing the same |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-17T11%3A53%3A38IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Akiyama%20Takahiro&rft.date=2017-09-05&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS9752924B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |