Apparatus and method for cross-flow purge for optical components in a chamber

An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Delgado Gildardo, Hennigan Daniel R, Rose Garry, Larson H. Steven
Format:	Patent
Sprache:	eng
Schlagworte:	CLEANING CLEANING IN GENERAL CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGINGARTICLES OR MATERIALS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL STORING TRANSPORTING UNPACKING
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