Apparatus and method for cross-flow purge for optical components in a chamber
An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an...
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| creator | Delgado Gildardo Hennigan Daniel R Rose Garry Larson H. Steven |
| description | An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber. |
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Steven</creatorcontrib><description>An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.</description><language>eng</language><subject>CLEANING ; CLEANING IN GENERAL ; CONVEYING ; HANDLING THIN OR FILAMENTARY MATERIAL ; MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGINGARTICLES OR MATERIALS ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PACKING ; PERFORMING OPERATIONS ; PHYSICS ; PREVENTION OF FOULING IN GENERAL ; STORING ; TRANSPORTING ; UNPACKING</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170530&DB=EPODOC&CC=US&NR=9662688B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170530&DB=EPODOC&CC=US&NR=9662688B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Delgado Gildardo</creatorcontrib><creatorcontrib>Hennigan Daniel R</creatorcontrib><creatorcontrib>Rose Garry</creatorcontrib><creatorcontrib>Larson H. 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Steven</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Apparatus and method for cross-flow purge for optical components in a chamber</title><date>2017-05-30</date><risdate>2017</risdate><abstract>An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | CLEANING CLEANING IN GENERAL CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGINGARTICLES OR MATERIALS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL STORING TRANSPORTING UNPACKING |
| title | Apparatus and method for cross-flow purge for optical components in a chamber |
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