Micromachined piezoelectric x-axis gyroscope

A method of fabricating a gyroscope may involve depositing conductive material on a substrate, forming an anchor on the substrate, forming a drive frame on the anchor and forming pairs of drive beams on opposing sides of the anchor. The drive beams may be configured to constrain the drive frame to r...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shenoy Ravindra V, Petersen Kurt Edward, Ganapathi Srinivasan Kodaganallur, Stephanou Philip Jason, Acar Cenk, Black Justin Phelps
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY GYROSCOPIC INSTRUMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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