Substrate edge clamping force tester

Substrate edge clamping force tester

An apparatus and methods for measuring the clamping force applied to a substrate by clamping elements of a substrate holder. The apparatus include a pneumatic cylinder, a two position, three way valve and a pressure gauge. In a first position of the valve, the gauge and a bore of the cylinder are ve...

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Hauptverfasser: Mahan Bradley M, Tong Tracy A, Bandy John J, Stevens, Jr. Ralph W
Format: Patent
Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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creator Mahan Bradley M
Tong Tracy A
Bandy John J
Stevens, Jr. Ralph W
description An apparatus and methods for measuring the clamping force applied to a substrate by clamping elements of a substrate holder. The apparatus include a pneumatic cylinder, a two position, three way valve and a pressure gauge. In a first position of the valve, the gauge and a bore of the cylinder are vented or pre-pressurized. In a second position of the valve, the bore and gauge are isolated. The methods include placing the apparatus with the valve in the first position between clamping elements set to a non-clamping position, moving the valve to the second position, setting the clamping elements to a clamping position and reading a pressure on the gauge.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
title Substrate edge clamping force tester
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