Electrostatic chuck system and method of manufacturing organic light-emitting display apparatus by using the electrostatic chuck system
Provided are an electrostatic chuck system and a method of manufacturing an organic light-emitting display apparatus by using the electrostatic chuck system. The electrostatic chuck system comprises: a stage in which a first electrode and a second electrode are arranged, the first electrode having a...
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| creator | Lee Duckjung Park Jungsun Yun Kiyoung |
| description | Provided are an electrostatic chuck system and a method of manufacturing an organic light-emitting display apparatus by using the electrostatic chuck system. The electrostatic chuck system comprises: a stage in which a first electrode and a second electrode are arranged, the first electrode having a first polarity and the second electrode having a second polarity that is different from the first polarity; a display substrate on the stage, the display substrate including a pixel electrode on a surface thereof; and an optical mask over the surface of the display substrate, the optical mask including a reflection layer and a transfer layer to be transferred to the display substrate, wherein the display substrate has one of the first and second polarities, and the optical mask has the other of the first and second polarities as the display substrate. |
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| subjects | BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES |
| title | Electrostatic chuck system and method of manufacturing organic light-emitting display apparatus by using the electrostatic chuck system |
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