Method for fabricating a magnetic recording device having a high aspect ratio structure

A method provides a magnetic write apparatus on a substrate. A mask is provided on a substrate. The mask has a trench therein. The trench has a top, a bottom and a plurality of sidewalls extending between the top and the bottom of the trench. The top of the trench is wider than the bottom. A protect...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: He Li, Wan Dujiang, Yi Ge, Wang Fujian, Zhou Jikou
Format: Patent
Sprache:eng
Schlagworte:
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