Method and apparatus for generating a proof-mass drive signal

A drive-mode oscillator module generates at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device. The drive-mode oscillator module comprises at least one gain control component arranged to receive at least one proof-mass motion measurement signal, and to g...

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Hauptverfasser: Cornibert Laurent, Beaulaton Hugues, Cassagnes Thierry, Trauth Gerhard
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creator Cornibert Laurent
Beaulaton Hugues
Cassagnes Thierry
Trauth Gerhard
description A drive-mode oscillator module generates at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device. The drive-mode oscillator module comprises at least one gain control component arranged to receive at least one proof-mass motion measurement signal, and to generate a digital modulation control signal based at least partly on the at least one proof-mass motion measurement signal, and at least one modulation component arranged to receive the digital amplitude modulation control signal, and to output at least one proof-mass drive signal. The at least one modulation component is arranged to digitally modulate the at least one proof-mass drive signal based at least partly on the received digital amplitude modulation control signal.
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subjects CALCULATING
COMPUTING
COUNTING
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC DIGITAL DATA PROCESSING
ELECTRICITY
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION
title Method and apparatus for generating a proof-mass drive signal
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