Test pattern of semiconductor device

A test pattern of a semiconductor device is provided, which includes first and second fins formed to project from a substrate and arranged to be spaced apart from each other, first and second gate structures formed to cross the first and second fins, respectively, a first source region and a first d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kang Dae-Lim, Hsu Wei-Hua, Choi Jun-Suk, Woo Sang-Hyun, Kwon Min-Ho, Rhee Hwa-Sung
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A test pattern of a semiconductor device is provided, which includes first and second fins formed to project from a substrate and arranged to be spaced apart from each other, first and second gate structures formed to cross the first and second fins, respectively, a first source region and a first drain region arranged on the first fin on one side and the other side of the first gate structure, a second source region and a second drain region arranged on the second fin on one side and the other side of the second gate structure, a first conductive pattern connected to the first and second drain regions to apply a first voltage to the first and second drain regions and a second conductive pattern connecting the first source region and the second gate structure to each other.