Inspection apparatus and inspection method for inspecting a wiring board

An inspection apparatus for inspecting a wiring board having an opposing electrode facing an upper face of the wiring board, a capacitance meter electrically connected to the opposing electrode and the multi-layer wiring, and measuring capacitance between the opposing electrode and the multi-layer w...

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Bibliographische Detailangaben
1. Verfasser: Fukami Yoshiyuki
Format: Patent
Sprache:eng
Schlagworte:
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