Ultrasonic probe and ultrasonic inspection apparatus

An ultrasonic probe includes a substrate, a diaphragm, a thin-film piezoelectric element, a communication passage, and an air hole. The substrate has first and second cavities thereon. The diaphragm is configured at the first cavity. The thin-film piezoelectric element is configured to the diaphragm...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Nakamura Tomoaki, Hosomi Hiroaki
Format:	Patent
Sprache:	eng
Schlagworte:	DIAGNOSIS FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL HUMAN NECESSITIES HYGIENE IDENTIFICATION MEDICAL OR VETERINARY SCIENCE METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS SURGERY TRANSPORTING
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