Piezoelectric element and piezoelectric element application device

A piezoelectric element including a first electrode 60, a piezoelectric body layer 70, and a second electrode 80, in which a seed layer 65, which performs control such that the piezoelectric body layer 70 is preferentially oriented with respect to a specific crystal plane, is formed between the firs...

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1. Verfasser: Isshiki Tetsuya
Format: Patent
Sprache:eng
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Zusammenfassung:A piezoelectric element including a first electrode 60, a piezoelectric body layer 70, and a second electrode 80, in which a seed layer 65, which performs control such that the piezoelectric body layer 70 is preferentially oriented with respect to a specific crystal plane, is formed between the first electrode 60 and the piezoelectric body layer 70, and the seed layer 65 is formed from a composite oxide with a perovskite structure that includes at least Bi, Sr, Fe and Ti and an element ratio of Bi, Sr, Fe, and Ti in the seed layer satisfies the Formula (1) below. Bi:Sr:Fe:Ti=x·(1−y):y:1−z:z  (1) (1.0≦x