Internal chamber rotation motor, alternative rotation

Embodiments of the present invention generally relate to a rotation device in an RTP chamber. The rotation device includes a cylindrical inner race, a plurality of thrust bearings and a plurality of radial bearings. During operation, the bearings create a gas cushion preventing the rotating parts fr...

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1. Verfasser: KARAZIM MICHAEL P
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creator KARAZIM MICHAEL P
description Embodiments of the present invention generally relate to a rotation device in an RTP chamber. The rotation device includes a cylindrical inner race, a plurality of thrust bearings and a plurality of radial bearings. During operation, the bearings create a gas cushion preventing the rotating parts from contacting the stationary parts.
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subjects BAKERS' OVENS
BAKING
BASIC ELECTRIC ELEMENTS
BEARINGS
BLASTING
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DRYING
DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
DYNAMO-ELECTRIC MACHINES
EDIBLE DOUGHS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELEMENTS OR CRANKSHAFT MECHANISMS
ENGINEERING ELEMENTS AND UNITS
FLEXIBLE SHAFTS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
GENERATION
HEATING
HUMAN NECESSITIES
LIGHTING
MACHINES OR EQUIPMENT FOR BAKING
MECHANICAL ENGINEERING
ROTARY BODIES OTHER THAN GEARING ELEMENTS
SEMICONDUCTOR DEVICES
SHAFTS
THERMAL INSULATION IN GENERAL
WEAPONS
title Internal chamber rotation motor, alternative rotation
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