Miniature sensor structures for ion mobility spectrometers

Miniature sensor structures for ion mobility spectrometers

For ion mobility spectrometry applications, a desired shape of a sensor structure may be created by forming a desired shape from a ceramic material, such as aluminum nitride. In various embodiments, the sensor structure may be formed using discrete individual ceramic sheets and/or from a preformed c...

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Hauptverfasser: ANDERSON ANDREW G, IVASHIN DMITRIY V, BOUMSELLEK SAID, VELAZQUEZ TROY A
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator ANDERSON ANDREW G
IVASHIN DMITRIY V
BOUMSELLEK SAID
VELAZQUEZ TROY A
description For ion mobility spectrometry applications, a desired shape of a sensor structure may be created by forming a desired shape from a ceramic material, such as aluminum nitride. In various embodiments, the sensor structure may be formed using discrete individual ceramic sheets and/or from a preformed ceramic tube. Via holes are formed into the sensor structure to provide for efficient circuitry configurations of the IMS drift tube and/or providing electrical connections between the interior and exterior of the drift tube.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title Miniature sensor structures for ion mobility spectrometers
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