Integrated photoemission sources and scalable photoemission structures

A scalable, integrated photoemitter device and method of manufacture using conventional CMOS manufacturing techniques. The photoemitter device has a first semiconductor substrate having a plurality of photonic sources formed on top in a first material layer, the plurality of photonic sources and the...

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Bibliographische Detailangaben
1. Verfasser: BONAM RAVI K
Format: Patent
Sprache:eng
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