Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece

Methods are disclosed for calibrating a force constant of a movable stage. In an exemplary method, in first and second preliminary pre-stepping motions of the stage, a baseline force and a calibration force, respectively, as exerted by the stage are measured. From a force-variation ratio of the base...

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Bibliographische Detailangaben

1. Verfasser:	YANG PAI-HSUEH
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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