Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece
Methods are disclosed for calibrating a force constant of a movable stage. In an exemplary method, in first and second preliminary pre-stepping motions of the stage, a baseline force and a calibration force, respectively, as exerted by the stage are measured. From a force-variation ratio of the base...
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| creator | YANG PAI-HSUEH |
| description | Methods are disclosed for calibrating a force constant of a movable stage. In an exemplary method, in first and second preliminary pre-stepping motions of the stage, a baseline force and a calibration force, respectively, as exerted by the stage are measured. From a force-variation ratio of the baseline force and calibration force an inverse closed loop factor is estimated. In at least one subsequent pre-stepping motion of the stage before a respective use of the stage for holding an object, a residual force-variation ratio is estimated, a force-compensation factor is updated from the residual force-variation ratio, and a respective force-variation coefficient is determined from the force-compensation factor. |
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In an exemplary method, in first and second preliminary pre-stepping motions of the stage, a baseline force and a calibration force, respectively, as exerted by the stage are measured. From a force-variation ratio of the baseline force and calibration force an inverse closed loop factor is estimated. In at least one subsequent pre-stepping motion of the stage before a respective use of the stage for holding an object, a residual force-variation ratio is estimated, a force-compensation factor is updated from the residual force-variation ratio, and a respective force-variation coefficient is determined from the force-compensation factor.</description><language>eng</language><subject>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT ; MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK ; PHYSICS ; TESTING ; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES ; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160126&DB=EPODOC&CC=US&NR=9243969B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25544,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160126&DB=EPODOC&CC=US&NR=9243969B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YANG PAI-HSUEH</creatorcontrib><title>Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece</title><description>Methods are disclosed for calibrating a force constant of a movable stage. In an exemplary method, in first and second preliminary pre-stepping motions of the stage, a baseline force and a calibration force, respectively, as exerted by the stage are measured. From a force-variation ratio of the baseline force and calibration force an inverse closed loop factor is estimated. In at least one subsequent pre-stepping motion of the stage before a respective use of the stage for holding an object, a residual force-variation ratio is estimated, a force-compensation factor is updated from the residual force-variation ratio, and a respective force-variation coefficient is determined from the force-compensation factor.</description><subject>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</subject><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</subject><subject>PHYSICS</subject><subject>TESTING</subject><subject>TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES</subject><subject>TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2016</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjDEKAjEQRbexEPUOcwGbXRHSKoqNlVovYzKJwTUTklkFT28kHsDqw-O9P23ckeTGBiwn0Dj4a0LxwQF-iSbQHLJgEGBb2IOFk3-TgQIdwZippnmMkVMtgynes568ON2jJ03zZmJxyLT47ayB_e68PSwpck85oqZA0l9Oql11aq02bfeH8gEYkj-d</recordid><startdate>20160126</startdate><enddate>20160126</enddate><creator>YANG PAI-HSUEH</creator><scope>EVB</scope></search><sort><creationdate>20160126</creationdate><title>Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece</title><author>YANG PAI-HSUEH</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US9243969B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2016</creationdate><topic>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</topic><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</topic><topic>PHYSICS</topic><topic>TESTING</topic><topic>TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES</topic><topic>TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR</topic><toplevel>online_resources</toplevel><creatorcontrib>YANG PAI-HSUEH</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YANG PAI-HSUEH</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece</title><date>2016-01-26</date><risdate>2016</risdate><abstract>Methods are disclosed for calibrating a force constant of a movable stage. In an exemplary method, in first and second preliminary pre-stepping motions of the stage, a baseline force and a calibration force, respectively, as exerted by the stage are measured. From a force-variation ratio of the baseline force and calibration force an inverse closed loop factor is estimated. In at least one subsequent pre-stepping motion of the stage before a respective use of the stage for holding an object, a residual force-variation ratio is estimated, a force-compensation factor is updated from the residual force-variation ratio, and a respective force-variation coefficient is determined from the force-compensation factor.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR |
| title | Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece |
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