Humidity sensor and method of manufacturing the same

A humidity sensor includes a humidity detention section, a pad section, and a dam section. The humidity detention section includes a pair of detection electrodes facing each other on a predetermined surface of a substrate and a humidity-sensitive film covering the detection electrodes. The pad secti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SAKAI MINEKAZU, NIIMI NAOHISA
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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