Patterned photoresist to attach a carrier wafer to a silicon device wafer

Patterned photoresist is used to attach a carrier wafer to a silicon device wafer. In one example, a silicon wafer is patterned for contact bumps by applying a photoresist over a surface of the wafer and removing the photoresist in locations at which the contact bumps are to be formed. The contact b...

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Bibliographische Detailangaben

Hauptverfasser:	TOH CHIN HOCK, KITOWSKI AKSEL, TAN THEAN MING, MAHAJAN UDAY
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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