Method and apparatus for holding a plurality of substrates for processing

A substrate carrier includes a carrier plate, a cover plate and a plurality of substrate support slots. The carrier plate has recesses for receiving substrates. A sidewall of each recess includes protrusions for engaging the OD of a substrate. The cover plate is rotatable and has a cam on an undersu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HERTEL RICHARD J, MACINTOSH EDWARD, FAIRHURST JOHN ROBERT, KRAMPERT JEFFREY E
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!