Micro-plasma generation using micro-springs

An ionic wind engine unit for cooling semiconductor circuit assemblies includes a curved micro-spring and an associated electrode that are maintained apart at an appropriate gap distance such that, when subjected to a sufficiently high voltage potential (i.e., as determined by Peek's Law), curr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHOW EUGENE M, CHENG BOWEN, DEBRUYKER DIRK
Format: Patent
Sprache:eng
Schlagworte:
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