Method of manufacturing organic light-emitting display apparatus by using an organic layer deposition apparatus having stacked deposition sources

A method of manufacturing an organic light-emitting display apparatus includes: disposing an organic layer deposition apparatus to be apart from a substrate by a set distance; and depositing deposition material on the substrate while the organic layer deposition apparatus or the substrate is moved r...

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Hauptverfasser: SUNG UNOL, KIM MU-HYUN
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KIM MU-HYUN
description A method of manufacturing an organic light-emitting display apparatus includes: disposing an organic layer deposition apparatus to be apart from a substrate by a set distance; and depositing deposition material on the substrate while the organic layer deposition apparatus or the substrate is moved relative to the other, the deposition source apparatus including: a deposition source including a first deposition source and a second deposition source stacked on the first deposition source; a deposition source nozzle unit including a second deposition source nozzle unit at a side of the second deposition source to face the substrate and including a plurality of second deposition source nozzles, and a first deposition source nozzle unit at the side of the second deposition source to face the substrate and including a plurality of first deposition source nozzles formed to pass through the second deposition source; and a patterning slit sheet smaller than the substrate.
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subjects APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
PERFORMING OPERATIONS
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
SEMICONDUCTOR DEVICES
SPRAYING OR ATOMISING IN GENERAL
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TRANSPORTING
title Method of manufacturing organic light-emitting display apparatus by using an organic layer deposition apparatus having stacked deposition sources
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