Vitreous silica crucible having outer, intermediate, and inner layers

A vitreous silica crucible has high strength at high temperature, and allows easy taking-out from a susceptor after completion of pulling. The vitreous silica crucible includes a vitreous silica outer layer provided on the outer surface side of the crucible, a vitreous silica inner layer provided on...

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Hauptverfasser: SATO MASARU, SUDO TOSHIAKI
Format: Patent
Sprache:eng
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