Linear motor and stage device

A linear motor includes a field magnet and an armature. The field magnet includes a pair of opposing field magnet yokes. A yoke base is disposed on a first end of each field magnet yoke in a Y axis direction. Between the field magnet yokes, a first magnet row is disposed including, along an X axis d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HOSHI TOSHIYUKI, WATANABE KENJI
Format: Patent
Sprache:eng
Schlagworte:
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