Semiconductor device

A semiconductor device includes a plurality of epitaxial layers stacked over a supportive substrate, a first buried impurity region formed to share the supportive substrate with a lowermost epitaxial layer among the multiple epitaxial layers, one or more second buried impurity regions formed to be c...

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Bibliographische Detailangaben
Hauptverfasser: LEE KUEM-JU, KO KWANG-SIK, PARK JOO-WON
Format: Patent
Sprache:eng
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