Semiconductor device and method for manufacturing the same

A highly reliable semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device is manufactured with a high yield to achieve high productivity. In the manufacture of a semiconductor device including a transistor in which a gate electrode layer, a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMAZAKI SHUNPEI, TOCHIBAYASHI KATSUAKI, HIGANO SATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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