Method for making electrical structure with air dielectric and related electrical structures

A method has been described for making an electrical structure having an air dielectric and includes forming a first subunit including a sacrificial substrate, an electrically conductive layer including a first metal on the sacrificial substrate, and a sacrificial dielectric layer on the sacrificial...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SMITH DAVID M, WEATHERSPOON MICHAEL RAYMOND, RENDEK, JR. LOUIS JOSEPH, MALONEY ROBERT PATRICK, SHACKLETTE LAWRENCE WAYNE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS SEMICONDUCTOR DEVICES
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