Connecting through vias to devices

Methods and devices for connecting a through via and a terminal of a transistor formed of a strained silicon material are provided. The terminal, which can be a source or a drain of a NMOS or a PMOS transistor, is formed within a substrate. A first contact within a first inter-layer dielectric (ILD)...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JAN SEN-BOR, CHEN MING-FA, WANG YU-YOUNG
Format: Patent
Sprache:eng
Schlagworte:
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