Controlled fluid delivery in a microelectronic package

A microelectronic package includes a die which may include MEMS and CMOS circuitry for analyzing a fluid. A defined path is provided for channeling fluid to the die. Rather than patterning depressions or physical channels in the package substrate, the defined paths comprise coatings that may channel...

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Hauptverfasser: SUPRIYA LAKSHMI, CHAKRAPANI NIRUPAMA, MATAYABAS, JR. JAMES C
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creator SUPRIYA LAKSHMI
CHAKRAPANI NIRUPAMA
MATAYABAS, JR. JAMES C
description A microelectronic package includes a die which may include MEMS and CMOS circuitry for analyzing a fluid. A defined path is provided for channeling fluid to the die. Rather than patterning depressions or physical channels in the package substrate, the defined paths comprise coatings that may channel the flow of liquids to the die for biological sensor type applications. The defined paths may comprise a wetting coating that has an affinity to fluids. Similarly, the defined paths may comprise a dewetting coating the tend to repel fluid surrounding the paths.
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subjects AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR
SHAPING OR JOINING OF PLASTICS
SPRAYING OR ATOMISING IN GENERAL
THEIR RELEVANT APPARATUS
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
title Controlled fluid delivery in a microelectronic package
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