High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope

High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope

A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arrange...

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Hauptverfasser: SPALLAS JAMES P, MURAY LAWRENCE P, INDERMUEHLE SCOTT W, KLYACHKO DIMITRI, WU YING
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASUREMENT OF NUCLEAR OR X-RADIATION
MEASURING
PHYSICS
TESTING
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creator SPALLAS JAMES P
MURAY LAWRENCE P
INDERMUEHLE SCOTT W
KLYACHKO DIMITRI
WU YING
description A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arranged to output an electron beam towards the sample holder at an initial beam energy. The auxiliary acceleration voltage source is to apply an auxiliary acceleration voltage between the sample holder and the layered electron beam column to accelerate the electron beam to a final beam energy. At the final beam energy, the electron beam is capable of generating x-rays at multiple wavelengths from a larger range of atomic species than the electron beam at the initial beam energy.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US9099276B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US9099276B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US9099276B13</originalsourceid><addsrcrecordid>eNrjZIjxyEzP0C3LzylJTE9VSM1LLUqv1E3JLC5ILSrOLEtVADKSS4ryi5PzCyoVSosz89IVEhVy8svhWoqTE_PyQMKpOWCVeQq5mckQDak8DKxpiTnFqbxQmptBwc01xNlDN7UgPz61uCAxGWhhSXxosKWBpaWRuZmToTERSgDK2zzC</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope</title><source>esp@cenet</source><creator>SPALLAS JAMES P ; MURAY LAWRENCE P ; INDERMUEHLE SCOTT W ; KLYACHKO DIMITRI ; WU YING</creator><creatorcontrib>SPALLAS JAMES P ; MURAY LAWRENCE P ; INDERMUEHLE SCOTT W ; KLYACHKO DIMITRI ; WU YING</creatorcontrib><description>A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arranged to output an electron beam towards the sample holder at an initial beam energy. The auxiliary acceleration voltage source is to apply an auxiliary acceleration voltage between the sample holder and the layered electron beam column to accelerate the electron beam to a final beam energy. At the final beam energy, the electron beam is capable of generating x-rays at multiple wavelengths from a larger range of atomic species than the electron beam at the initial beam energy.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; MEASUREMENT OF NUCLEAR OR X-RADIATION ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20150804&amp;DB=EPODOC&amp;CC=US&amp;NR=9099276B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20150804&amp;DB=EPODOC&amp;CC=US&amp;NR=9099276B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SPALLAS JAMES P</creatorcontrib><creatorcontrib>MURAY LAWRENCE P</creatorcontrib><creatorcontrib>INDERMUEHLE SCOTT W</creatorcontrib><creatorcontrib>KLYACHKO DIMITRI</creatorcontrib><creatorcontrib>WU YING</creatorcontrib><title>High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope</title><description>A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arranged to output an electron beam towards the sample holder at an initial beam energy. The auxiliary acceleration voltage source is to apply an auxiliary acceleration voltage between the sample holder and the layered electron beam column to accelerate the electron beam to a final beam energy. At the final beam energy, the electron beam is capable of generating x-rays at multiple wavelengths from a larger range of atomic species than the electron beam at the initial beam energy.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>MEASUREMENT OF NUCLEAR OR X-RADIATION</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZIjxyEzP0C3LzylJTE9VSM1LLUqv1E3JLC5ILSrOLEtVADKSS4ryi5PzCyoVSosz89IVEhVy8svhWoqTE_PyQMKpOWCVeQq5mckQDak8DKxpiTnFqbxQmptBwc01xNlDN7UgPz61uCAxGWhhSXxosKWBpaWRuZmToTERSgDK2zzC</recordid><startdate>20150804</startdate><enddate>20150804</enddate><creator>SPALLAS JAMES P</creator><creator>MURAY LAWRENCE P</creator><creator>INDERMUEHLE SCOTT W</creator><creator>KLYACHKO DIMITRI</creator><creator>WU YING</creator><scope>EVB</scope></search><sort><creationdate>20150804</creationdate><title>High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope</title><author>SPALLAS JAMES P ; MURAY LAWRENCE P ; INDERMUEHLE SCOTT W ; KLYACHKO DIMITRI ; WU YING</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US9099276B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2015</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>MEASUREMENT OF NUCLEAR OR X-RADIATION</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>SPALLAS JAMES P</creatorcontrib><creatorcontrib>MURAY LAWRENCE P</creatorcontrib><creatorcontrib>INDERMUEHLE SCOTT W</creatorcontrib><creatorcontrib>KLYACHKO DIMITRI</creatorcontrib><creatorcontrib>WU YING</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SPALLAS JAMES P</au><au>MURAY LAWRENCE P</au><au>INDERMUEHLE SCOTT W</au><au>KLYACHKO DIMITRI</au><au>WU YING</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope</title><date>2015-08-04</date><risdate>2015</risdate><abstract>A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arranged to output an electron beam towards the sample holder at an initial beam energy. The auxiliary acceleration voltage source is to apply an auxiliary acceleration voltage between the sample holder and the layered electron beam column to accelerate the electron beam to a final beam energy. At the final beam energy, the electron beam is capable of generating x-rays at multiple wavelengths from a larger range of atomic species than the electron beam at the initial beam energy.</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASUREMENT OF NUCLEAR OR X-RADIATION
MEASURING
PHYSICS
TESTING
title High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-22T23%3A12%3A13IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SPALLAS%20JAMES%20P&rft.date=2015-08-04&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS9099276B1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true