Valve, fluidic apparatus, and fluid-supplying apparatus

A valve includes a valve body, a diaphragm dividing the inside of the valve body into first and second valve chambers and being displaced under a pressure of fluid, first and second openings in communication with the first valve chamber, and a third opening in communication with the second valve cha...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SASAI HIDEKAZU, MAEDA TAKENOBU, KAMITANI GAKU
Format: Patent
Sprache:eng
Schlagworte:
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