Sensor element, sensor device, and electronic apparatus

A sensor element includes a base part, a detection vibrating arm extended from the base part, and detection parts that are provided on the detection vibrating arm and detect flexural vibration of the detection vibrating arm, the detection parts each have a first electrode layer, a second electrode l...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ASARI TOMOTAKA
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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