Interference measurement device and measurement method

[Problem to be Solved] To improve the measurement accuracy of an interference measurement device which utilizes interference of light. [Means for Solution] An interference measurement device includes a light source 10 for emitting supercontinuum light (SC light), an optical fiber coupler 11 for spli...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HORI MASARU, ITO MASAFUMI, OHTA TAKAYUKI, HIGASHIJIMA YASUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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