Dummy structures and methods

A semiconductor device and a method of making a semiconductor device are disclosed. The method of manufacturing a semiconductor device comprises forming a material layer on a substrate, patterning a first semi-global region with a first main pattern and patterning a second semi-global region with a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HUEBINGER FRANK, KAEMMER KERSTIN, ROTHENHAEUSSER STEFFEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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