Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus

A deposition apparatus for depositing a deposition material on a substrate in order to improve characteristics of a deposition layer includes: a deposition source facing the substrate and ejecting the deposition material; a patterning slit sheet including patterning slits for depositing the depositi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHOI MYONG-HWAN, CHOI WOON-HYUN, OH KYOUNG-WON, KIM KYUNG-HAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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