Device for coating substrates disposed on a susceptor

The invention relates to a device for coating substrates having a process chamber (1) disposed in a reactor housing and a two-part, substantially cup-shaped susceptor (2, 3) disposed therein, forming an upper susceptor part (2) with the cup floor thereof having a flat plate (2′) and a lower suscepto...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KÄPPELER JOHANNES, MULDER JAN, BOYD ADAM, FERON OLIVIER, SAYWELL VICTOR
Format: Patent
Sprache:eng
Schlagworte:
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