Pattern forming apparatus and pattern forming method

The supply of a negative pressure to an opening P(+1) adjacent to an opening P(0) is stopped by switching a suction valve connected to the opening P(+1) from an open state to a closed state while keeping a positive pressure valve connected thereto closed. Then, near the opening P(+1), a force for ho...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MASUICHI MIKIO, KOMURA TOMOYUKI, KAWAGOE MASAFUMI, UENO HIROYUKI, NAKAJIMA MIYOSHI
Format: Patent
Sprache:eng
Schlagworte:
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