Method for fabricating capacitor

A method for fabricating a capacitor includes: forming a storage node contact plug over a substrate; forming an insulation layer having an opening exposing a surface of the storage node contact plug over the storage contact plug; forming a conductive layer for a storage node over the insulation laye...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK KI-SEON, YEOM SEUNG-JIN, KIL DEOK-SIN, KIM JIN-HYOCK, ROH JAE-SUNG, SONG HAN-SANG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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