Single-body electrostatic chuck
An electrostatic chuck includes a thermally conductive base having a plurality of heating elements disposed therein. A metal layer covers at least a portion of the thermally conductive base, wherein the metal layer shields the plurality of heating elements from radio frequency (RF) coupling and func...
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| creator | LUBOMIRSKY DMITRY MAKHRATCHEV KONSTANTIN THACH SENH SUN JENNIFER Y |
| description | An electrostatic chuck includes a thermally conductive base having a plurality of heating elements disposed therein. A metal layer covers at least a portion of the thermally conductive base, wherein the metal layer shields the plurality of heating elements from radio frequency (RF) coupling and functions as an electrode for the electrostatic chuck. A plasma resistant dielectric layer covers the metal layer. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US8941969B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US8941969B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US8941969B23</originalsourceid><addsrcrecordid>eNrjZJAPzsxLz0nVTcpPqVRIzUlNLinKLy5JLMlMVkjOKE3O5mFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8aHBFpYmhpZmlk5GxkQoAQD3XiT1</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Single-body electrostatic chuck</title><source>esp@cenet</source><creator>LUBOMIRSKY DMITRY ; MAKHRATCHEV KONSTANTIN ; THACH SENH ; SUN JENNIFER Y</creator><creatorcontrib>LUBOMIRSKY DMITRY ; MAKHRATCHEV KONSTANTIN ; THACH SENH ; SUN JENNIFER Y</creatorcontrib><description>An electrostatic chuck includes a thermally conductive base having a plurality of heating elements disposed therein. A metal layer covers at least a portion of the thermally conductive base, wherein the metal layer shields the plurality of heating elements from radio frequency (RF) coupling and functions as an electrode for the electrostatic chuck. A plasma resistant dielectric layer covers the metal layer.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CORONA DEVICES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES ; OVERVOLTAGE ARRESTERS USING SPARK GAPS ; SEMICONDUCTOR DEVICES ; SPARK GAPS ; SPARKING PLUGS</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150127&DB=EPODOC&CC=US&NR=8941969B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150127&DB=EPODOC&CC=US&NR=8941969B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LUBOMIRSKY DMITRY</creatorcontrib><creatorcontrib>MAKHRATCHEV KONSTANTIN</creatorcontrib><creatorcontrib>THACH SENH</creatorcontrib><creatorcontrib>SUN JENNIFER Y</creatorcontrib><title>Single-body electrostatic chuck</title><description>An electrostatic chuck includes a thermally conductive base having a plurality of heating elements disposed therein. A metal layer covers at least a portion of the thermally conductive base, wherein the metal layer shields the plurality of heating elements from radio frequency (RF) coupling and functions as an electrode for the electrostatic chuck. A plasma resistant dielectric layer covers the metal layer.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CORONA DEVICES</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES</subject><subject>OVERVOLTAGE ARRESTERS USING SPARK GAPS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SPARK GAPS</subject><subject>SPARKING PLUGS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJAPzsxLz0nVTcpPqVRIzUlNLinKLy5JLMlMVkjOKE3O5mFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8aHBFpYmhpZmlk5GxkQoAQD3XiT1</recordid><startdate>20150127</startdate><enddate>20150127</enddate><creator>LUBOMIRSKY DMITRY</creator><creator>MAKHRATCHEV KONSTANTIN</creator><creator>THACH SENH</creator><creator>SUN JENNIFER Y</creator><scope>EVB</scope></search><sort><creationdate>20150127</creationdate><title>Single-body electrostatic chuck</title><author>LUBOMIRSKY DMITRY ; MAKHRATCHEV KONSTANTIN ; THACH SENH ; SUN JENNIFER Y</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US8941969B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2015</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CORONA DEVICES</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES</topic><topic>OVERVOLTAGE ARRESTERS USING SPARK GAPS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SPARK GAPS</topic><topic>SPARKING PLUGS</topic><toplevel>online_resources</toplevel><creatorcontrib>LUBOMIRSKY DMITRY</creatorcontrib><creatorcontrib>MAKHRATCHEV KONSTANTIN</creatorcontrib><creatorcontrib>THACH SENH</creatorcontrib><creatorcontrib>SUN JENNIFER Y</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LUBOMIRSKY DMITRY</au><au>MAKHRATCHEV KONSTANTIN</au><au>THACH SENH</au><au>SUN JENNIFER Y</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Single-body electrostatic chuck</title><date>2015-01-27</date><risdate>2015</risdate><abstract>An electrostatic chuck includes a thermally conductive base having a plurality of heating elements disposed therein. A metal layer covers at least a portion of the thermally conductive base, wherein the metal layer shields the plurality of heating elements from radio frequency (RF) coupling and functions as an electrode for the electrostatic chuck. A plasma resistant dielectric layer covers the metal layer.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | BASIC ELECTRIC ELEMENTS CORONA DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES OVERVOLTAGE ARRESTERS USING SPARK GAPS SEMICONDUCTOR DEVICES SPARK GAPS SPARKING PLUGS |
| title | Single-body electrostatic chuck |
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