Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow

Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the pr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MERRY WALTER R, ZHOU XIAOPING, MAHADESWARASWAMY CHETAN, SILVEIRA FERNANDO M, MAYS BRAD L, PATTAR YASHASWINI B, TSONG TINA, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER DOUGLAS A, NGUYEN DUY D
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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