Drive end-block for a rotatable magnetron

A drive end block for a rotatable magnetron comprises a housing, which has a vacuum-tight rotary feedthrough extending through a wall of the housing, and a drive apparatus for generating a torque. An output end of the rotary feedthrough lies outside the housing for connection to the rotatable magnet...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SANDER THORSTEN, HEINRICH HANS-JUERGEN, GROSSER GOETZ
Format: Patent
Sprache:eng
Schlagworte:
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