Integrated two dimensional robotic palm for variable pitch positioning of multiple transfer devices

A handling device includes a base plate defining an X-Y plane, a plurality of X rails movably supported on the base plate and extending in an X-direction, a plurality of Y rails movably supported on the base plate and extending in a Y-direction perpendicular to the X-direction and a drive system sup...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PILOCK THOMAS, FAIZULLABHOY MUSTANSIR, EIDELBERG BOAZ, HARAN PATRICK, QUIGLEY MATTHEW
Format: Patent
Sprache:eng
Schlagworte:
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