Electronic component with reactive barrier and hermetic passivation layer

An electronic component is provided on a substrate. A thin-film capacitor is attached to the substrate, the thin-film capacitor includes a pyrochlore or perovskite dielectric layer between a plurality of electrode layers, the electrode layers being formed from a conductive thin-film material. A reac...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WOO PAUL BUN CHEUK, CAPANU MIRCEA, NAGY SUSAN C, ZELNER MARINA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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