Air bearing for substrate inspection device

A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHAO GUOHENG, BELYAEV ALEXANDER, RUNYON J. REX, DANDO HOWARD W, VAEZ-IRAVANI MEHDI, DOYLE PAUL, WOLTERS CHRISTIAN H
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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