Inline defect analysis for sampling and SPC

In one embodiment, an inline defect analysis method includes receiving geometric characteristics of individual defects and design data corresponding to the individual defects, determining which of the individual defects are likely to be nuisance defects using the geometric characteristics and the co...

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Hauptverfasser:	JAWAHARLAL SUNDAR, SVIDENKO VICKY, SCHWARM ALEXANDER T, SHIMSHI RINAT, NEHMADI YOUVAL
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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creator	JAWAHARLAL SUNDAR SVIDENKO VICKY SCHWARM ALEXANDER T SHIMSHI RINAT NEHMADI YOUVAL
description	In one embodiment, an inline defect analysis method includes receiving geometric characteristics of individual defects and design data corresponding to the individual defects, determining which of the individual defects are likely to be nuisance defects using the geometric characteristics and the corresponding design data, and refraining from sampling the defects that are likely to be nuisance defects.
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subjects	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
title	Inline defect analysis for sampling and SPC
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