On-chip measurement of capacitance for micro-electro-mechanical system (MEMS) actuator circuit

A micro-electro-mechanical system (MEMS) actuator circuit and method. The circuit includes a current mirror, a voltage divider having an interior contact and coupled between the mirror output and a potential, an operational amplifier having an input coupled to the interior contact and a switch havin...

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1. Verfasser:	GUO DIANBO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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creator	GUO DIANBO
description	A micro-electro-mechanical system (MEMS) actuator circuit and method. The circuit includes a current mirror, a voltage divider having an interior contact and coupled between the mirror output and a potential, an operational amplifier having an input coupled to the interior contact and a switch having input/output contacts separately coupled to the amplifier output and the mirror input and having a switch control. The amplifier output can be coupled to a digital control circuit which can be coupled to the switch control contact and to a digital to analog circuit (DAC) which can be coupled to the digital control circuit and to another amplifier input. An enable signal at the switch control couples the switch input/output contacts together. The capacitance of a MEMS capacitor coupled to the mirror output is determined by measurement of time for the amplifier output to switch from one level to another following a change in DAC output potential.
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subjects	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
title	On-chip measurement of capacitance for micro-electro-mechanical system (MEMS) actuator circuit
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