Solid-state image pickup element, method of manufacturing the same, and electronic apparatus using the same

Solid-state image pickup element, method of manufacturing the same, and electronic apparatus using the same

Disclosed herein is a solid-state image pickup element, including: a semiconductor substrate; a pixel portion which is formed on the semiconductor substrate and in which a plurality of pixels each having a photoelectric conversion portion are arranged; an insulating layer formed on the semiconductor...

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Hauptverfasser: SHIGA YASUYUKI, MIYASHITA NAOYUKI, SUGIURA IWAO, KOKUBUN KATSUNORI, YAMAZAKI TOMOHIRO, TOUMIYA YOSHINORI, TABUCHI KIYOTAKA, IWASAKI MASANORI
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PICTORIAL COMMUNICATION, e.g. TELEVISION
SEMICONDUCTOR DEVICES
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creator SHIGA YASUYUKI
MIYASHITA NAOYUKI
SUGIURA IWAO
KOKUBUN KATSUNORI
YAMAZAKI TOMOHIRO
TOUMIYA YOSHINORI
TABUCHI KIYOTAKA
IWASAKI MASANORI
description Disclosed herein is a solid-state image pickup element, including: a semiconductor substrate; a pixel portion which is formed on the semiconductor substrate and in which a plurality of pixels each having a photoelectric conversion portion are arranged; an insulating layer formed on the semiconductor substrate so as to cover the photoelectric conversion portion; a hole portion formed in the insulating layer and above the photoelectric conversion portion; a silicon nitride layer formed so as to cover a bottom surface and a side surface of the hole portion; and a buried layer formed on the silicon nitride layer, wherein the silicon nitride layer is formed so as to contain a silicon nitride formed by utilizing an atomic layer deposition method.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PICTORIAL COMMUNICATION, e.g. TELEVISION
SEMICONDUCTOR DEVICES
title Solid-state image pickup element, method of manufacturing the same, and electronic apparatus using the same
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