Composite substrate carrier

A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the oth...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BHATT SANJIV M, EGGUM SHAWN D
Format: Patent
Sprache:eng
Schlagworte:
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