Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same

Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same

A charged particle beam device includes an electron source structured to generate an electron beam, the electron source being coupled to an electron column that at least partially houses a system structured to direct the electron beam toward a specimen positioned in a sample chamber to which the ele...

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Hauptverfasser: BARBI NICHOLAS C, PIEMONTE CLAUDIO, LOPOUR FILIP, MOTT RICHARD B
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator BARBI NICHOLAS C
PIEMONTE CLAUDIO
LOPOUR FILIP
MOTT RICHARD B
description A charged particle beam device includes an electron source structured to generate an electron beam, the electron source being coupled to an electron column that at least partially houses a system structured to direct the electron beam toward a specimen positioned in a sample chamber to which the electron column is coupled, and an electron detector. The electron detector includes one or more assemblies positioned within the electron column or the sample chamber, each of the assemblies including an SiPM and a scintillator directly connected face-to-face to an active light sensing surface of the SiPM without a light transporting device being positioned in between the scintillator and the SiPM.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same
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