Precision driver circuits for micro-electro-mechanical system

There is disclosed a driver circuits and method for driving a micro-electro-mechanical system. A driver circuit may include a converter to convert a digital input value into a pulse-width modulated signal with precise amplitude. A low pass filter may extract an average DC component of the pulse-widt...

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1. Verfasser: INBAR MICHAEL
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:There is disclosed a driver circuits and method for driving a micro-electro-mechanical system. A driver circuit may include a converter to convert a digital input value into a pulse-width modulated signal with precise amplitude. A low pass filter may extract an average DC component of the pulse-width modulated signal. An amplifier may amplify the average DC component to provide an output voltage to drive the MEMS.